Mechanical Properties of Silicon Based Compounds: Silicides
Joshua PellegThis book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based compounds. The author also presents dislocation in silicides, fatigue and fracture aspects. A special chapter is given on deformation in silicides in the nano scale. Composites and alloys are also considered.
年:
2019
出版:
1st ed.
出版社:
Springer International Publishing
语言:
english
ISBN 10:
3030225984
ISBN 13:
9783030225988
系列:
Engineering Materials
文件:
PDF, 22.49 MB
IPFS:
,
english, 2019
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