Handbook of Sputter Deposition Technology: Principles, Technology and Applications (Materials Science and Process Technology Series)
Kiyotaka Wasa, Shigeru Haber
A concise, comprehensive overview of sputter deposition technology?a key technology for materials research in the next decade. Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ferroelectric materials are other applications.
种类:
年:
1993
语言:
english
页:
316
ISBN 10:
0815517734
ISBN 13:
9780815517733
文件:
PDF, 10.15 MB
IPFS:
,
english, 1993